• DocumentCode
    3288873
  • Title

    Die attach quality control of 3D stacked dies

  • Author

    Rencz, M. ; Székely, V. ; Courtois, B. ; Zhang, L. ; Howard, N. ; Nguyen, L.

  • Author_Institution
    MicReD Ltd., Budapest, Hungary
  • fYear
    2004
  • fDate
    July 14-16, 2004
  • Firstpage
    78
  • Lastpage
    84
  • Abstract
    In this paper, we present a methodology that can be used to determine the die attach failures of packaged stacked die structures. After presenting the methodology simulation experiments show the applicability for stacked die packages. The accuracy issues are discussed by evaluating the first measured results. The results of blind tests measurements are also presented. With the evaluation of these measurements we demonstrate that the methodology is in fact applicable to find the location of the integrity problems also within packages containing stack dies.
  • Keywords
    chip scale packaging; failure analysis; integrated circuit reliability; microassembling; 3D stacked dies; accuracy issues; blind tests measurements; die attach failures; die attach quality control; packaged stacked die structures; Capacitance; Electrical resistance measurement; Electron devices; Laboratories; Microassembly; Quality control; Semiconductor device packaging; Semiconductor device testing; Temperature; Thermal resistance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Manufacturing Technology Symposium, 2004. IEEE/CPMT/SEMI 29th International
  • ISSN
    1089-8190
  • Print_ISBN
    0-7803-8582-9
  • Type

    conf

  • DOI
    10.1109/IEMT.2004.1321636
  • Filename
    1321636