DocumentCode
3289377
Title
Design of a NEMS based LC oscillation circuit for tiny vibration determination
Author
Yin, Ming ; Guo, Cangran ; Liu, Zewen ; Zhao, Yingjiang
Author_Institution
Inst. of Microelectron., Tsinghua Univ., Beijing, China
fYear
2011
fDate
15-17 April 2011
Firstpage
285
Lastpage
288
Abstract
A novel design of NEMS resonator based LC oscillation circuit for detection of tiny vibration is proposed. The relationship between the tiny vibration of the NEMS resonator beam and the frequency of LC oscillation is analyzed. With the resonator as the part of the LC oscillation, IC compatible processes based oscillation circuit are conceived and simulated. The simulation result demonstrates the oscillation bandwidth is 1.75MHz under the 2nm NEMS beam vibration amplitude.
Keywords
circuit oscillations; nanoelectromechanical devices; nanofabrication; resonators; vibration measurement; IC compatible processes; LC oscillation circuit; NEMS resonator; beam vibration amplitude; frequency 1.75 MHz; tiny vibration determination; wavelength 2 nm; Integrated circuit modeling; MOS devices; Nanoelectromechanical systems; Optical resonators; Oscillators; Resonant frequency; Vibrations; IC compatible; NEMS resonator; oscillation circuit; tiny vibration;
fLanguage
English
Publisher
ieee
Conference_Titel
Electric Information and Control Engineering (ICEICE), 2011 International Conference on
Conference_Location
Wuhan
Print_ISBN
978-1-4244-8036-4
Type
conf
DOI
10.1109/ICEICE.2011.5778098
Filename
5778098
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