• DocumentCode
    3289406
  • Title

    Photoimageable auto-catalytic resin metallization as an alternative to sputtering

  • Author

    Kondo, Masaki ; Esposito, Chris ; Imanari, Masaaki ; Nomura, Makoto ; Arao, Kei ; Kanda, Takashi ; Tsukagoshi, Satoru

  • Author_Institution
    Rohm & Haas Electron. Mater. K.K., Niigata, Japan
  • fYear
    2004
  • fDate
    July 14-16, 2004
  • Firstpage
    238
  • Lastpage
    241
  • Abstract
    In order to miniaturized mobile phones, PDAs, and other handheld electronic devise, the use of wafer level packaging such as MCP and SIP with various functionalities has increased significantly. Polyimide, BCB, and epoxy resin systems are widely used as dielectric redistribution materials. Sputtering has been the metallization technology of choice for UBM and seed layers. However, the high cost and poor adhesive reliability are issues with sputtering reliability are issues with sputtering as a metallization technology. As an alternative to sputtering technology, a photoimageable auto-catalytic resin (PAR) has been designed that enables the electroless metallization of a wide variety of substrates, including WL-CSP dielectrics such as polyimide film, glass, and ceramics. PAR also enables interconnects with excellent electrical and adhesive reliability. This paper focuses on the properties and reliability of PAR materials as a new metallization technology.
  • Keywords
    integrated circuit packaging; metallisation; resins; sputtering; substrates; BCB; MCP; PAR materials; PDA; SIP; UBM; WL-CSP dielectrics; adhesive reliability; ceramics; dielectric redistribution materials; electrical reliability; electroless metallization; epoxy resin; glass; handheld electronic devise; miniaturized mobile phones; photoimageable auto-catalytic resin; polyimide film; seed layers; sputtering reliability; wafer level packaging; Costs; Dielectric materials; Dielectric substrates; Epoxy resins; Metallization; Mobile handsets; Personal digital assistants; Polyimides; Sputtering; Wafer scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Manufacturing Technology Symposium, 2004. IEEE/CPMT/SEMI 29th International
  • ISSN
    1089-8190
  • Print_ISBN
    0-7803-8582-9
  • Type

    conf

  • DOI
    10.1109/IEMT.2004.1321668
  • Filename
    1321668