Leveraging mainstream design and analysis tools for MEMS

Mainstream CAD/CAE tools are used to rapidly design and commercialize a broad product line of rugged MEMS-based devices for applications including RF/wireless, telecom, oil and gas production, process monitoring, medical diagnostics and scientific discovery. These tools deliver the robust capabilities previously available only with specialized, often expensive, MEMS-focused options. This paper illustrates some of the considerations in choosing a MEMS CAD/CAE tool, and provides examples of mainstream tools successfully used in MEMS design and analysis.