An Electromagnetic MEMS Actuator for Micropumps

Author

Getpreecharsawas, Jirachai ; Puchades, Ivan ; Hournbuckle, Bobby ; Fuller, Lynn ; Pearson, Robert ; Lyshevski, Sergey

Author_Institution

Dept. of Electr. Eng., Rochester Inst. of Technol., NY

fYear

2006

fDate

24-27 May 2006

Firstpage

11

Lastpage

14

Abstract

In this paper, design, fabrication and evaluation of an electromagnetic MEMS micropump actuator are reported. Based on MEMS technology, the proposed micropump actuator is designed and fabricated using integrated surface and bulk micromachining at the Microfabrication Facility at the Rochester Institute of Technology. A thin silicon diaphragm with a planar spiral coil ensures the desired degree of robustness and guarantees the specified volumetric changes. The magnetic force is generated due to the interaction between the magnetic field of a permanent magnet and current in the coil. The experimental results are reported

Keywords

electromagnetic actuators; microactuators; micromachining; micropumps; permanent magnets; bulk micromachining; electromagnetic MEMS actuator; electromagnetic MEMS micropumps; magnetic force; permanent magnet; planar spiral coil; surface micromachining; thin silicon diaphragm; Actuators; Coils; Fabrication; Magnetic forces; Micromachining; Micromechanical devices; Micropumps; Robustness; Silicon; Spirals; Actuator; MEMS; electromagnetic micropump; micromachine; silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on

Conference_Location

Lviv

Print_ISBN

966-553-517-X

Type

conf

DOI

10.1109/MEMSTECH.2006.288652

Filename

4068416