Title :
MOEMS With Thin-Film Crystals
Author :
Lyshevski, M.A. ; Lyshevski, Sergey Edward
Author_Institution :
Microsyst. & Nanotechnologies, Webster, NY
Abstract :
In this paper we examine high-performance micro-opto-electro-mechanical systems (MOEMS). The studied MOEMS composed from optoelectromagnetic active high-refractive index thin-film crystals, radiating energy devices (antenna), variable-wavelength vertical cavity surface emitting laser (VCSEL), and driving/controlling integrated circuits (lCs). In order to steer and accurately position a beam, we vary the high-frequency electric field and light wavelength. Experimental, applied and fundamental results are reported
Keywords :
crystals; magneto-optical devices; micro-optomechanical devices; refractive index; surface emitting lasers; thin films; MOEMS; VCSEL; driving/controlling integrated circuits; high-frequency electric field; high-refractive index thin-film crystals; light wavelength; micro-opto-electro-mechanical systems; optoelectromagnetic active thin-film crystals; radiating energy devices; vertical cavity surface emitting laser; Crystals; Design optimization; Electric variables control; Holography; Optical device fabrication; Optical refraction; Optical variables control; System-on-a-chip; Transistors; Vertical cavity surface emitting lasers; ICs; MOEMS; crystals;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
Conference_Location :
Lviv
Print_ISBN :
966-553-517-X
DOI :
10.1109/MEMSTECH.2006.288670
