Title :
Model of Capacitive Microaccelerometer
Author :
Teslyuk, Vasyl ; Zaharyuk, Roman
Abstract :
Model of capacitive accelerometer is designed. Designed model allow to measure top- and bottom-side capacities. Presented modeling results as capacity and construction strain dependencies from the acceleration
Keywords :
accelerometers; capacitive sensors; microsensors; capacitive accelerometer; capacitive microaccelerometer; capacitive sensor; Acceleration; Accelerometers; Capacitance; Capacitive sensors; Capacitors; Electrodes; Mathematical model; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Capacitive accelerometer; IDT accelerometer; Runge-Kutta IV order method;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
Conference_Location :
Lviv
Print_ISBN :
966-553-517-X
DOI :
10.1109/MEMSTECH.2006.288671
