• DocumentCode
    3290269
  • Title

    Petri Networks Application during MEMS Design Process

  • Author

    Teslyuk, V. ; Romanyuk, A. ; Matviykiv, T.

  • Author_Institution
    Dept. of CAD/CAM, Lviv Polytech. Nat. Univ.
  • fYear
    2006
  • fDate
    24-27 May 2006
  • Firstpage
    159
  • Lastpage
    160
  • Abstract
    This paper is to define the peculiarities of Petri networks application on the system level of MEMS design
  • Keywords
    Petri nets; micromechanical devices; MEMS design process; Petri networks; Actuators; Computational modeling; Microelectromechanical devices; Microelectromechanical systems; Micromechanical devices; Microprocessors; Process design; Sensor systems; Signal analysis; Signal processing; MEMS; Petri networks;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Perspective Technologies and Methods in MEMS Design, 2006. MEMSTECH 2006. Proceedings of the 2nd International Conference on
  • Conference_Location
    Lviv
  • Print_ISBN
    966-553-517-X
  • Type

    conf

  • DOI
    10.1109/MEMSTECH.2006.288689
  • Filename
    4068453
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3290269