Title :
Optimization Of Tilt-implanted Punchthrough Stopper On Short-channel Behavior In Quarter-micron Mosfet With Low-concentration Wells
Author :
Lin, Chih-Hsien ; Yang, Jiunn-Jer ; Young, Konrad ; Chiu, Kuang-Yi
Keywords :
Degradation; Doping; Electronics industry; Implants; Industrial electronics; Leakage current; MOS devices; MOSFET circuits; Optimization methods; Threshold voltage;
Conference_Titel :
VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on
Conference_Location :
Taipei, Taiwan
Print_ISBN :
0-7803-4131-7
DOI :
10.1109/VTSA.1997.614915
