DocumentCode
3290755
Title
Optimization Of Tilt-implanted Punchthrough Stopper On Short-channel Behavior In Quarter-micron Mosfet With Low-concentration Wells
Author
Lin, Chih-Hsien ; Yang, Jiunn-Jer ; Young, Konrad ; Chiu, Kuang-Yi
fYear
1997
fDate
3-5 June 1997
Firstpage
303
Lastpage
306
Keywords
Degradation; Doping; Electronics industry; Implants; Industrial electronics; Leakage current; MOS devices; MOSFET circuits; Optimization methods; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, Systems, and Applications, 1997. Proceedings of Technical Papers. 1997 International Symposium on
Conference_Location
Taipei, Taiwan
ISSN
1524-766X
Print_ISBN
0-7803-4131-7
Type
conf
DOI
10.1109/VTSA.1997.614915
Filename
614915
Link To Document