• DocumentCode
    3291022
  • Title

    On the mechanism of stabilization of low-field electron emission from dielectric films on metals

  • Author

    Dadykin, A.A. ; Naumovets, A.G.

  • Author_Institution
    Inst. of Phys., Acad. of Sci., Kiev, Ukraine
  • fYear
    1996
  • fDate
    7-12 Jul 1996
  • Firstpage
    166
  • Lastpage
    169
  • Abstract
    We have carried out a comparative study of the low-field electron emission (LFEE) from a range of dielectric films such as a-C, i-C, ZnS, SiO2 and some others. The results suggest the existence of a common mechanism governing LFEE from dielectric films on metals. It is concluded that the slope of the FN plots in the high-current (stable) range of LFEE depends on the shape of the interface (metal/dielectric) barrier as well as on the thickness and band structure of the film. In this case the “working region” of the emitter is not exposed to vacuum, which provides the high stability of LFEE even at mTorr pressures as found in our experiments
  • Keywords
    dielectric thin films; electron field emission; C; Fowler-Nordheim characteristics; LFEE; SiO2; ZnS; band structure; dielectric film; interface barrier; low-field electron emission; metal; stabilization; 1f noise; Anodes; Coatings; Dielectric films; Diodes; Electron emission; Optical microscopy; Sputtering; Stability; Zinc compounds;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
  • Conference_Location
    St. Petersburg
  • Print_ISBN
    0-7803-3594-5
  • Type

    conf

  • DOI
    10.1109/IVMC.1996.601798
  • Filename
    601798