Title :
Fabrication Of SOI Wafers With Buried Cavities Using Silicon Fusion Bonding And Electrochemical Etchback
Author :
Noworolski, J. Mark ; Klaassen, Erno ; Logan, John ; Petersen, Kurt ; Maluf, Nadim
Author_Institution :
UC Berkeley
Keywords :
Actuators; Costs; Crystalline materials; Etching; Fabrication; Manufacturing; Micromechanical devices; Silicon on insulator technology; Thickness control; Wafer bonding;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717090
