DocumentCode

329139

Title

Automatic Etch Stop On Buried Oxide Using Epitaxial Lateral Overgrowth

Author

Gennissen, P.T.J. ; Bartek, M. ; French, P.J. ; Sarro, P.M. ; Wolffenbuttel, R.F.

Author_Institution

Delft University of Technology

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

75

Lastpage

78

Keywords

Biomembranes; Boron; Epitaxial layers; Etching; Fabrication; Mechanical sensors; Production; Silicon; Substrates; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717091

Filename

717091