Title :
Automatic Etch Stop On Buried Oxide Using Epitaxial Lateral Overgrowth
Author :
Gennissen, P.T.J. ; Bartek, M. ; French, P.J. ; Sarro, P.M. ; Wolffenbuttel, R.F.
Author_Institution :
Delft University of Technology
Keywords :
Biomembranes; Boron; Epitaxial layers; Etching; Fabrication; Mechanical sensors; Production; Silicon; Substrates; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717091
