Title :
pH-controlled TMAH Etchants For Silicon Micromachining
Author_Institution :
Toyota Central Research and Development Laboratories, Inc.
Keywords :
Aluminum; Anisotropic magnetoresistance; Etching; Mechanical variables measurement; Micromachining; Research and development; Rough surfaces; Silicon; Surface roughness; Time measurement;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717094
