Title :
The experimental method of the estimation of the evaporating fields for the microprotrusions
Author_Institution :
A.F. Ioffe Physicotech. Inst., Acad. of Sci., St. Petersburg, Russia
Abstract :
The new method of the estimation of the evaporating fields Fev for the thermo-field microprotrusions based on Fowler-Nordheim theory are described. This method fits to any materials both refractory and fusible. The microprotrusions have usually the radii of curvature r~10-100 Å and from one to some atoms on the top and well-known methods of Fev determination are not suitable. Besides that the values of Fev for this small objects are considerable less in comparison with the Fev for the “large” tips. This method requires for realisation only simple field electron microscope. The exactness of this method is limited by the exactness of the determination of the field factor β by means of F-N plots and by the applicability of F-N theory to the microprotrusions
Keywords :
field emission ion microscopy; field evaporation; ion emission; Fowler-Nordheim theory; evaporating field; field electron microscopy; field factor; fusible material; radius of curvature; refractory material; thermo-field microprotrusion; Atomic measurements; Electron microscopy; Gases; Ionization; Iron; Microelectronics; Physics; Voltage measurement;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601800