The experimental method of the estimation of the evaporating fields for the microprotrusions

Author

Golubev, O.L.

Author_Institution

A.F. Ioffe Physicotech. Inst., Acad. of Sci., St. Petersburg, Russia

fYear

1996

fDate

7-12 Jul 1996

Firstpage

174

Lastpage

178

Abstract

The new method of the estimation of the evaporating fields F_ev for the thermo-field microprotrusions based on Fowler-Nordheim theory are described. This method fits to any materials both refractory and fusible. The microprotrusions have usually the radii of curvature r~10-100 Å and from one to some atoms on the top and well-known methods of F_ev determination are not suitable. Besides that the values of F_ev for this small objects are considerable less in comparison with the F_ev for the “large” tips. This method requires for realisation only simple field electron microscope. The exactness of this method is limited by the exactness of the determination of the field factor β by means of F-N plots and by the applicability of F-N theory to the microprotrusions

Keywords

field emission ion microscopy; field evaporation; ion emission; Fowler-Nordheim theory; evaporating field; field electron microscopy; field factor; fusible material; radius of curvature; refractory material; thermo-field microprotrusion; Atomic measurements; Electron microscopy; Gases; Ionization; Iron; Microelectronics; Physics; Voltage measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International

Conference_Location

St. Petersburg

Print_ISBN

0-7803-3594-5

Type

conf

DOI

10.1109/IVMC.1996.601800

Filename

601800