Title :
Hexsil Bimorphs For Vertical Actuation
Author :
Keller, Chris G. ; Howe, Roger T.
Author_Institution :
University of California at Berkeley
Keywords :
Actuators; Design engineering; Etching; Glass; Hafnium; Poles and towers; Residual stresses; Silicon; Solid state circuits; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717102
