An Oscillator Circuit For Electrostatically Driven Silicon-based One-port Resonators

Author

Bienstman, Jan ; Tilmans, Harrie A C ; Steyaert, Michiel ; Puers, Robert

Author_Institution

Katholicke Universiteit Leuven

Volume

fYear

1995

fDate

25-29 Jun 1995

Firstpage

146

Lastpage

149

Keywords

Capacitance; Electrostatics; Equivalent circuits; Force sensors; Oscillators; Polarization; Resonance; Resonant frequency; Springs; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.717116

Filename

717116

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