Title :
An Oscillator Circuit For Electrostatically Driven Silicon-based One-port Resonators
Author :
Bienstman, Jan ; Tilmans, Harrie A C ; Steyaert, Michiel ; Puers, Robert
Author_Institution :
Katholicke Universiteit Leuven
Keywords :
Capacitance; Electrostatics; Equivalent circuits; Force sensors; Oscillators; Polarization; Resonance; Resonant frequency; Springs; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717116
