High-voltage Devices And Circuits Fabricated Using Foundry Cmos For Use With Electrostatic Mem Actuators

Author

Maluf, N.I. ; Reay, R.J. ; Kovacs, G.T.A.

Author_Institution

Lucas NovaSensor

Volume

fYear

1995

fDate

25-29 Jun 1995

Firstpage

158

Lastpage

161

Keywords

CMOS process; Circuits; Electric breakdown; Electrodes; Electrostatics; Fasteners; Foundries; MOS devices; Testing; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.717121

Filename

717121

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