Title :
Mistic 1.1: A Process Compiler for Micromachined Devices
Author :
Hasanuzzaman, M. ; Mastrangelo, C.H.
Author_Institution :
University of Michigan
Keywords :
Circuits; Etching; Fabrication; Lithography; Sensor phenomena and characterization; Sensor systems; Substrates; Thin film devices; Thin film sensors; Topology;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717130
