DocumentCode

329163

Title

Mistic 1.1: A Process Compiler for Micromachined Devices

Author

Hasanuzzaman, M. ; Mastrangelo, C.H.

Author_Institution

University of Michigan

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

182

Lastpage

185

Keywords

Circuits; Etching; Fabrication; Lithography; Sensor phenomena and characterization; Sensor systems; Substrates; Thin film devices; Thin film sensors; Topology;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717130

Filename

717130