DocumentCode

329164

Title

Alignment Of Mask Patterns To Crystal Orientation

Author

Ensell, G.

Author_Institution

The University of Southampton

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

186

Lastpage

189

Keywords

Computer science; Crystallography; Etching; Inspection; Lithography; Microscopy; Optical sensors; Shape; Silicon; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717131

Filename

717131