Title :
Boron Etch-stop In TMAH Solutions
Author :
Steinsland, Elin ; Nese, Martin ; Hanneborg, Anders ; Bernstein, R.W. ; Sandmo, Halle ; Kittilsland, Gjermund
Author_Institution :
Univerity of Oslo
Keywords :
Anisotropic magnetoresistance; Boron; Doping profiles; Etching; Glass; Ion implantation; Lithography; Silicon; Temperature; Thermal resistance;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717135
