Title :
Polysilicon Surface Modification Technique To Reduce Sticking Of Microstructures
Author :
Yee, Youngjoo ; Chun, Kukjin ; Lee, Jong Duk
Author_Institution :
Seoul National University
Keywords :
Dry etching; Grain boundaries; Lithography; Micromachining; Microstructure; Oxidation; Rough surfaces; Solids; Substrates; Surface roughness;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717142
