DocumentCode

329169

Title

Polysilicon Surface Modification Technique To Reduce Sticking Of Microstructures

Author

Yee, Youngjoo ; Chun, Kukjin ; Lee, Jong Duk

Author_Institution

Seoul National University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

206

Lastpage

209

Keywords

Dry etching; Grain boundaries; Lithography; Micromachining; Microstructure; Oxidation; Rough surfaces; Solids; Substrates; Surface roughness;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717142

Filename

717142