DocumentCode

329171

Title

A novel method to avoid sticking of surface micromachined structures

Author

Kozlowski, F. ; Lindmair, N. ; Scheiter, Th ; Hierold, C. ; Lang, W.

Author_Institution

Fraunhofer Institute for Solid State Technology

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

220

Lastpage

223

Keywords

Dry etching; Force measurement; Hafnium; Plasma applications; Polymers; Resists; Silicon; Solids; Solvents; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717148

Filename

717148