Title :
A novel method to avoid sticking of surface micromachined structures
Author :
Kozlowski, F. ; Lindmair, N. ; Scheiter, Th ; Hierold, C. ; Lang, W.
Author_Institution :
Fraunhofer Institute for Solid State Technology
Keywords :
Dry etching; Force measurement; Hafnium; Plasma applications; Polymers; Resists; Silicon; Solids; Solvents; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717148
