DocumentCode

329172

Title

Permeable Polysilicon Etch-access Windows For Microshell Fabrication

Author

Lebouitz, Kyle S. ; Howe, Roger T. ; Pisano, Albert P.

Author_Institution

University of California at Berkeley

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

224

Lastpage

227

Keywords

Actuators; Encapsulation; Etching; Fabrication; Hafnium; Mechanical sensors; Nitrogen; Seals; Shape; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717149

Filename

717149