DocumentCode

329173

Title

Quality Of The Aluminium Press-on Contacts For Glass To Silicon Bonding

Author

Kádár, Zsolt ; Bossche, Andre ; Mollinger, Jeff

Author_Institution

Delft University of Technology

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

232

Lastpage

235

Keywords

Aluminum; Bonding; Capacitors; Contacts; Electrodes; Etching; Glass; Parasitic capacitance; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717152

Filename

717152