Title :
Cavity Pressure Control For Critical Damping Of Packaged Micro Mechanical Devices
Author :
Minami, Kazuyuki ; Moriuchi, Terumi ; Esashi, Masayoshi
Author_Institution :
Tohoku University
Keywords :
Accelerometers; Argon; Damping; Frequency response; Gettering; Glass; Packaging; Pressure control; Silicon; Wafer bonding;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717155
