DocumentCode

329175

Title

Cavity Pressure Control For Critical Damping Of Packaged Micro Mechanical Devices

Author

Minami, Kazuyuki ; Moriuchi, Terumi ; Esashi, Masayoshi

Author_Institution

Tohoku University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

240

Lastpage

243

Keywords

Accelerometers; Argon; Damping; Frequency response; Gettering; Glass; Packaging; Pressure control; Silicon; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717155

Filename

717155