DocumentCode
329179
Title
Basic Micro Module For Chemical Sensors With On Chip Heater And Buried Sensor Structure
Author
Mutschall, D. ; Scheibe, C. ; Obermeier, E.
Author_Institution
Technical University of Berlin
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
256
Lastpage
259
Keywords
Biomembranes; Chemical sensors; Cogeneration; Gas detectors; Heat sinks; Heat transfer; Temperature dependence; Temperature sensors; Thermal conductivity; Thermal sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717161
Filename
717161
Link To Document