Title :
Basic Micro Module For Chemical Sensors With On Chip Heater And Buried Sensor Structure
Author :
Mutschall, D. ; Scheibe, C. ; Obermeier, E.
Author_Institution :
Technical University of Berlin
Keywords :
Biomembranes; Chemical sensors; Cogeneration; Gas detectors; Heat sinks; Heat transfer; Temperature dependence; Temperature sensors; Thermal conductivity; Thermal sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717161
