DocumentCode

329180

Title

New Method For Testing Hermeticity Of Silicon Sensor Structures

Author

Nese, Martin ; Bernstein, R.W. ; Johansen, Ib-Rune ; Spooren, Rudie

Author_Institution

SINTEF Sensor Technology

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

260

Lastpage

262

Keywords

Absorption; Atmosphere; Atmospheric measurements; Equations; Gas detectors; Helium; Leak detection; Semiconductor device measurement; Silicon; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717163

Filename

717163