Title :
New Method For Testing Hermeticity Of Silicon Sensor Structures
Author :
Nese, Martin ; Bernstein, R.W. ; Johansen, Ib-Rune ; Spooren, Rudie
Author_Institution :
SINTEF Sensor Technology
Keywords :
Absorption; Atmosphere; Atmospheric measurements; Equations; Gas detectors; Helium; Leak detection; Semiconductor device measurement; Silicon; Testing;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717163
