DocumentCode
329184
Title
A Multilayer Ceramic Package For Silicon Micromachined Accelerometers
Author
Koen, Edward ; Pourahmadi, Farzad ; Terry, Stephen
Author_Institution
EG&G IC Sensors
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
273
Lastpage
276
Keywords
Accelerometers; Application specific integrated circuits; Assembly; Automotive engineering; Ceramics; Electronics packaging; Nonhomogeneous media; Silicon; Thermal stresses; Vehicle dynamics;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717170
Filename
717170
Link To Document