Title :
Two Dimensional Silicon Micromachined Optical Scanner Integrated With Photo Detector And Piezoresistor
Author :
Ikeda, Masaaki ; Goto, Hiroshi ; Sakata, Minoru ; Wakabayashi, Syuichi ; Imanaka, Koichi ; Takeuchi, Masashi ; Yada, Tuneji
Author_Institution :
OMRON Corporation
Keywords :
Integrated optics; Mirrors; Optical beams; Optical resonators; Optical sensors; Piezoelectric actuators; Piezoresistance; Resonance; Silicon; Springs;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717176
