Title :
Integration Of Surface Micromachined Polysilicon Mirrors And A Standard Cmos Process
Author :
Fischer, M. ; Nagele, M. ; Eichner, D. ; Schollhorn, Claus ; Strobel, R.
Author_Institution :
Universitat Stuttgart
Keywords :
Actuators; Aluminum; CMOS process; CMOS technology; Circuits; Electrodes; Metallization; Micromachining; Mirrors; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717179
