• DocumentCode
    329189
  • Title

    A High-resolution Laser-based Deflection Measurement System For Characterizing Aluminum Electrostatic Actuators

  • Author

    Honer, Kenneth A. ; Maluf, Nadim I. ; Martinez, Edwardo ; Kovacs, Gregory T A

  • Author_Institution
    Stanford University
  • Volume
    1
  • fYear
    1995
  • fDate
    25-29 Jun 1995
  • Firstpage
    308
  • Lastpage
    311
  • Keywords
    Aluminum; Bandwidth; Electrostatic actuators; Electrostatic measurements; Laser beams; Lenses; Optical attenuators; Optical filters; Optical interferometry; Photodiodes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.717180
  • Filename
    717180
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=329189