Title :
Design And Fabrication Of Micro Mirror Supported By Electroplated Nickel Posts
Author :
Chung, Seok-Whan ; Shin, Jong-Woo ; Kim, Yong-Kweon ; Han, Bong-Soo
Author_Institution :
Seoul National University
Keywords :
Aluminum; Dry etching; Electrodes; Electrostatics; Fabrication; Fasteners; Mirrors; Nickel; Resists; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717181
