DocumentCode

329190

Title

Design And Fabrication Of Micro Mirror Supported By Electroplated Nickel Posts

Author

Chung, Seok-Whan ; Shin, Jong-Woo ; Kim, Yong-Kweon ; Han, Bong-Soo

Author_Institution

Seoul National University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

312

Lastpage

315

Keywords

Aluminum; Dry etching; Electrodes; Electrostatics; Fabrication; Fasteners; Mirrors; Nickel; Resists; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717181

Filename

717181