Title :
Fully Batch Fabricated Magnetic Microactuators Using A Two Layer Liga Process
Author :
Rogge, B. ; Schulz, J. ; Mohr, J. ; Thommes, A. ; Menz, W.
Author_Institution :
Forschungszentrum Karlsruhe
Keywords :
Coils; Magnetic cores; Magnetic flux; Micromagnetics; Microrelays; Optical device fabrication; Optical sensors; Relays; Springs; X-ray lithography;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717183
