Title :
Magnetic Microactuation Of Torsional Polysilicon Structures
Author :
Judy, Jack W. ; Muller, Richard S.
Author_Institution :
Berkeley Sensor & Actuator Center (BSAC)
Keywords :
Actuators; Fabrication; Magnetic fields; Magnetic films; Magnetic materials; Microactuators; Micromagnetics; Microstructure; Saturation magnetization; Torque;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717186
