DocumentCode

329195

Title

Magnetic Microactuation Of Torsional Polysilicon Structures

Author

Judy, Jack W. ; Muller, Richard S.

Author_Institution

Berkeley Sensor & Actuator Center (BSAC)

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

332

Lastpage

335

Keywords

Actuators; Fabrication; Magnetic fields; Magnetic films; Magnetic materials; Microactuators; Micromagnetics; Microstructure; Saturation magnetization; Torque;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717186

Filename

717186