• DocumentCode
    329196
  • Title

    Electrostatic And Magnetoelastic Microactuation Of Si/sun 3/N4 Bridges

  • Author

    Shearwood, C. ; Pate, M.A. ; Affane, W. ; Whitehouse, C.R. ; Woodhead, J. ; Gibbs, M.R.J.

  • Author_Institution
    University of Sheffield
  • Volume
    1
  • fYear
    1995
  • fDate
    25-29 Jun 1995
  • Firstpage
    336
  • Lastpage
    339
  • Keywords
    Anisotropic magnetoresistance; Bridge circuits; Electrodes; Electrostatics; Magnetic materials; Magnetic multilayers; Optical films; Optical sensors; Sun; Transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.717187
  • Filename
    717187
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=329196