Title :
Micromachined Devices For Optical Applications
Author_Institution :
Daimler-Benz Research
Keywords :
Etching; Integrated optics; Mirrors; Optical devices; Optical fiber cables; Optical fiber sensors; Optical sensors; Optical waveguides; Semiconductor lasers; Semiconductor waveguides;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717188
