DocumentCode
329197
Title
Micromachined Devices For Optical Applications
Author
Deimel, P.P.
Author_Institution
Daimler-Benz Research
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
340
Lastpage
343
Keywords
Etching; Integrated optics; Mirrors; Optical devices; Optical fiber cables; Optical fiber sensors; Optical sensors; Optical waveguides; Semiconductor lasers; Semiconductor waveguides;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717188
Filename
717188
Link To Document