DocumentCode :
329200
Title :
Surface-micromachined Movable SOI Optical Waveguides
Author :
Eng, Terry T H ; Sin, Stephen S Y ; Kan, Sidney C. ; Wong, George K.L.
Author_Institution :
Hong Kong Univ. of Sci. & Tech.
Volume :
1
fYear :
1995
fDate :
25-29 Jun 1995
Firstpage :
348
Lastpage :
350
Keywords :
Bridges; Optical device fabrication; Optical fiber polarization; Optical fibers; Optical losses; Optical sensors; Optical surface waves; Optical waveguides; Silicon; Surface waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.717198
Filename :
717198
Link To Document :
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