DocumentCode
329200
Title
Surface-micromachined Movable SOI Optical Waveguides
Author
Eng, Terry T H ; Sin, Stephen S Y ; Kan, Sidney C. ; Wong, George K.L.
Author_Institution
Hong Kong Univ. of Sci. & Tech.
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
348
Lastpage
350
Keywords
Bridges; Optical device fabrication; Optical fiber polarization; Optical fibers; Optical losses; Optical sensors; Optical surface waves; Optical waveguides; Silicon; Surface waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717198
Filename
717198
Link To Document