Title :
Surface-micromachined Movable SOI Optical Waveguides
Author :
Eng, Terry T H ; Sin, Stephen S Y ; Kan, Sidney C. ; Wong, George K.L.
Author_Institution :
Hong Kong Univ. of Sci. & Tech.
Keywords :
Bridges; Optical device fabrication; Optical fiber polarization; Optical fibers; Optical losses; Optical sensors; Optical surface waves; Optical waveguides; Silicon; Surface waves;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717198