Title :
Micromachined Optical Circular Gratings For Surface Light-emitting Devices
Author :
Noda, Susumu ; Ishikawa, Tsutomu ; Sasaki, Akio
Author_Institution :
Kyoto University
Keywords :
Electron beams; Electron optics; Gratings; Indium phosphide; Optical devices; Optical sensors; Particle beam optics; Resists; Stimulated emission; Substrates;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717199
