Title :
A Precision Flow Restrictor for Medical Infusion Theraphy
Author :
Drake, James ; Jerman, Hal
Author_Institution :
EG&G IC Sensors
Keywords :
Boring; Fabrication; Filters; Fluid flow; Fluid flow control; Glass; Hydraulic diameter; Silicon; Wafer bonding; Weight control;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717208
