Title :
Investigation of voltages and electric fields in silicon semi 3D radiation detectors using Silvaco/ATLAS simulation tool and a scanning electron microscope
Author :
Palviainen, Tanja ; Leinonen, Kari ; Tuuva, Tuure ; Eränen, Simo ; Härkönen, Jaakko ; Luukka, Panja ; Tuovinen, Esa
Author_Institution :
Dept. of Electr. Eng., Lappeenranta Univ. of Technol., Finland
Abstract :
The structure of silicon semi three-dimensional radiation detector is simulated on purpose to find out its electrical characteristics such as the depletion voltage and electric field. Two-dimensional simulation results are compared to voltage and electric field measurements done by a scanning electron microscope.
Keywords :
scanning electron microscopes; silicon radiation detectors; Silvaco/ATLAS simulation tool; depletion voltage; electric field; scanning electron microscope; silicon semi three-dimensional radiation detector; two-dimensional simulation; Anodes; Cathodes; Doping profiles; Electric variables measurement; Electrodes; Radiation detectors; Scanning electron microscopy; Silicon radiation detectors; Strips; Voltage;
Conference_Titel :
Nuclear Science Symposium Conference Record, 2005 IEEE
Print_ISBN :
0-7803-9221-3
DOI :
10.1109/NSSMIC.2005.1596576
