DocumentCode :
329206
Title :
Generating a microplasma with porotts silicon
Author :
Kozlowski, F. ; Huber, B. ; Steiner, P. ; Lang, W.
Author_Institution :
Fraunhofer Institute for Solid State Technology
Volume :
1
fYear :
1995
fDate :
25-29 Jun 1995
Firstpage :
381
Lastpage :
384
Keywords :
Electron emission; Etching; Flat panel displays; Hafnium; Liquid crystal displays; Nanoporous materials; Plasma applications; Silicon devices; Substrates; Surface discharges;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.717211
Filename :
717211
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=329206
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