DocumentCode
329206
Title
Generating a microplasma with porotts silicon
Author
Kozlowski, F. ; Huber, B. ; Steiner, P. ; Lang, W.
Author_Institution
Fraunhofer Institute for Solid State Technology
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
381
Lastpage
384
Keywords
Electron emission; Etching; Flat panel displays; Hafnium; Liquid crystal displays; Nanoporous materials; Plasma applications; Silicon devices; Substrates; Surface discharges;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717211
Filename
717211
Link To Document