Title :
Generating a microplasma with porotts silicon
Author :
Kozlowski, F. ; Huber, B. ; Steiner, P. ; Lang, W.
Author_Institution :
Fraunhofer Institute for Solid State Technology
Keywords :
Electron emission; Etching; Flat panel displays; Hafnium; Liquid crystal displays; Nanoporous materials; Plasma applications; Silicon devices; Substrates; Surface discharges;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717211