Fabrication And Characterization Of PZT Thin Films For Micromotors

Author

Muralt, Paul ; Kholkin, Andrei ; Kohli, Markus ; Maeder, Thomas ; Brooks, Keith G. ; Luthier, R. ; Setter, N.

Author_Institution

Ecole Politechnique Federale

Volume

fYear

1995

fDate

25-29 Jun 1995

Firstpage

397

Lastpage

400

Keywords

Biomembranes; Degradation; Electrodes; Fabrication; Micromotors; Piezoelectric films; Silicon; Stators; Testing; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.717217

Filename

717217

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