DocumentCode

329212

Title

Positioning To Nanometer Resolution With Ultrasonic Actuators

Author

Snitka, V. ; Zukauskas, D. ; Mizariene, V.

Author_Institution

Vibrotechnika Research Institute

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

409

Lastpage

412

Keywords

Actuators; Electrodes; Frequency; Friction; Magnetic materials; Motion control; Multidimensional systems; Piezoelectric transducers; Velocity control; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717222

Filename

717222