Title :
Positioning To Nanometer Resolution With Ultrasonic Actuators
Author :
Snitka, V. ; Zukauskas, D. ; Mizariene, V.
Author_Institution :
Vibrotechnika Research Institute
Keywords :
Actuators; Electrodes; Frequency; Friction; Magnetic materials; Motion control; Multidimensional systems; Piezoelectric transducers; Velocity control; Vibrations;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717222
