Title :
Fabrication Of An Electrostatic Microactuator With An S-shaped Film
Author :
Shikida, Mitsuhiro ; Sato, Kazuo ; Harada, Takeshi
Author_Institution :
Nagoya University
Keywords :
Actuators; Electrodes; Electrostatics; Fabrication; Gases; Insulation; Microactuators; Microvalves; Prototypes; Valves;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717228
