DocumentCode

329216

Title

Electrostatically Excited Diaphragm Driven As A Loudspeaker

Author

Rangsten, P. ; Smith, L. ; Rosengren, L. ; Hok, B.

Author_Institution

Uppsala University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

430

Lastpage

433

Keywords

Biomembranes; Bonding; Electrostatic actuators; Hermetic seals; Impedance matching; Loudspeakers; Resonance; Silicon; Ultrasonic transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717230

Filename

717230