DocumentCode :
329218
Title :
Capacitance Based Tunable Micromechanical Resonators
Author :
Adams, Scott G. ; Bertsch, Fred M. ; Shaw, Kevin A. ; Hartwell, Peter G. ; MacDonald, Noel C. ; Moon, Francis C.
Author_Institution :
Cornell University
Volume :
1
fYear :
1995
fDate :
25-29 Jun 1995
Firstpage :
438
Lastpage :
441
Keywords :
Capacitance; Electrodes; Electrostatic actuators; Equations; Laser tuning; Mechanical systems; Micromechanical devices; Oscillators; Resonance; Resonant frequency;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.717233
Filename :
717233
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=329218
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