Title :
Electrical Levitation For Micromotors And Microaccelerometers
Author :
He, G.H. ; Chen, K.S. ; Tan, S.S. ; Wang, W.Y.
Author_Institution :
Zhejiang University
Keywords :
Actuators; Frequency; Levitation; Micromotors; Parasitic capacitance; RLC circuits; Solid state circuits; Stators; Transducers; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717234
