DocumentCode

329219

Title

Electrical Levitation For Micromotors And Microaccelerometers

Author

He, G.H. ; Chen, K.S. ; Tan, S.S. ; Wang, W.Y.

Author_Institution

Zhejiang University

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

442

Lastpage

445

Keywords

Actuators; Frequency; Levitation; Micromotors; Parasitic capacitance; RLC circuits; Solid state circuits; Stators; Transducers; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717234

Filename

717234