Title :
Silicon Tube Structures For A Fluid Density Sensor
Author :
Enoksson, Peter ; Stemme, Goran ; Stemme, Erik
Author_Institution :
Royal Institute of Technology
Keywords :
Anisotropic magnetoresistance; Crystallization; Density measurement; Frequency measurement; Q factor; Resonance; Resonant frequency; Sensor systems; Silicon; Vibration measurement;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717279
