Title :
A Polysilicon Flow Sensor For Gas Flowmeters
Author :
Neda, Tokudai ; Nakamura, Kenichi ; Takumi, Tsugihiko
Author_Institution :
Frontier Technology Research Institute
Keywords :
Conducting materials; Crystalline materials; Dielectrics and electrical insulation; Gas detectors; Sensor phenomena and characterization; Silicon; Temperature sensors; Thermal conductivity; Thermal sensors; Wire;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717282
