DocumentCode
329245
Title
A Polysilicon Flow Sensor For Gas Flowmeters
Author
Neda, Tokudai ; Nakamura, Kenichi ; Takumi, Tsugihiko
Author_Institution
Frontier Technology Research Institute
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
548
Lastpage
551
Keywords
Conducting materials; Crystalline materials; Dielectrics and electrical insulation; Gas detectors; Sensor phenomena and characterization; Silicon; Temperature sensors; Thermal conductivity; Thermal sensors; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717282
Filename
717282
Link To Document