DocumentCode
329249
Title
The Black Silicon Method V: A Study Of The Fabricating Of Movable Structures For Micro Electromechanical Systems
Author
De Boer, Meint ; Jansen, Henri ; Elwenspoek, Miko
Author_Institution
University of Twente
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
565
Lastpage
568
Keywords
Dry etching; Electromechanical systems; Hafnium; Micromechanical devices; Plasma applications; Plasma immersion ion implantation; Plasma temperature; Resists; Silicon on insulator technology; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717287
Filename
717287
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